Investigations on sputter deposited lithium nickel manganese oxide thin film cathodes for micro battery applications

Abstract Lithium manganese oxide thin films have been deposited on nickel (Ni) and platinum (Pt) coated stainless steel substrates at room temperature using powder target by Radio Frequency (rf) reactive magnetron sputtering. The samples are exposed to heat treatment 500 °C form crystalline phase. Nickel film coatings carried out direct current (DC) X-ray diffraction (XRD), photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) electrochemical characterizations out. XPS spectra indicate the presence of all elements present in target. A discharge capacity 54 µAh µm−1 cm−2 48 has obtained from charge studies potential range 2.0 4.4 V for Ni Pt SS correspondingly Charge cycles conducted up 40 cycles.